JPS4979454A - - Google Patents
Info
- Publication number
- JPS4979454A JPS4979454A JP47121471A JP12147172A JPS4979454A JP S4979454 A JPS4979454 A JP S4979454A JP 47121471 A JP47121471 A JP 47121471A JP 12147172 A JP12147172 A JP 12147172A JP S4979454 A JPS4979454 A JP S4979454A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47121471A JPS4979454A (en]) | 1972-12-06 | 1972-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47121471A JPS4979454A (en]) | 1972-12-06 | 1972-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4979454A true JPS4979454A (en]) | 1974-07-31 |
Family
ID=14811958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47121471A Pending JPS4979454A (en]) | 1972-12-06 | 1972-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4979454A (en]) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5186358A (en) * | 1975-01-27 | 1976-07-28 | Nippon Electron Optics Lab | Denshisensochiniokerubiimujukuawasehohooyobisochi |
| JPS5573361U (en]) * | 1978-11-15 | 1980-05-20 | ||
| JPS5632655A (en) * | 1979-08-24 | 1981-04-02 | Toshiba Corp | Electron beam device |
| JPS56162464A (en) * | 1980-05-19 | 1981-12-14 | Hitachi Ltd | Electron beam application equipment |
| JPS5732557A (en) * | 1980-08-01 | 1982-02-22 | Hitachi Ltd | Scan electron microscope |
| JPH02109244A (ja) * | 1988-10-17 | 1990-04-20 | Sony Corp | イオンビーム装置 |
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1972
- 1972-12-06 JP JP47121471A patent/JPS4979454A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5186358A (en) * | 1975-01-27 | 1976-07-28 | Nippon Electron Optics Lab | Denshisensochiniokerubiimujukuawasehohooyobisochi |
| JPS5573361U (en]) * | 1978-11-15 | 1980-05-20 | ||
| JPS5632655A (en) * | 1979-08-24 | 1981-04-02 | Toshiba Corp | Electron beam device |
| JPS56162464A (en) * | 1980-05-19 | 1981-12-14 | Hitachi Ltd | Electron beam application equipment |
| JPS5732557A (en) * | 1980-08-01 | 1982-02-22 | Hitachi Ltd | Scan electron microscope |
| JPH02109244A (ja) * | 1988-10-17 | 1990-04-20 | Sony Corp | イオンビーム装置 |